Managing magnetic field interference for electron microscopes in the semiconductor industry
Transmission (TEM) and scanning electron microscopes (SEM), as well as focus ion beam (FIB) instruments are sensitive to interference from the environment, often arising from magnetic fields or vibrations. Active Solution Company Ltd. provides Spicer Consulting’s magnetic field cancelling systems to companies working with electron microscopes in the Korean semiconductor industry – for TEM, SEM and FIB platforms – to overcome the problems associated with interference.
Advancements in semiconductor manufacturing have made production of tiny components on a nanometre scale more practical than ever before. Electron microscopy – such as TEM, SEM and FIB-SEM – is a vital quality control tool in the manufacture of these semiconductors, used to structurally analyse devices for any problems. However, image quality is commonly affected by external factors, and can make it challenging to identify faults. Jong Hwa Hur, President of Active Solution Company Ltd., explained: “When a customer experiences technical issues with their electron microscope, I visit their site and conduct a survey to measure and analyse for any interference and vibrations. This allows me to identify the causes and propose effective solutions. We supply Spicer Consulting’s magnetic field cancelling systems and active vibration isolation tables to help the semiconductor industry across Korea overcome electron microscopy problems.”
“Magnetic field interference is normally caused by a 60 Hz frequency, commonly present from the abundance of different machinery in these manufacturing facilities. Additionally, the newest semi-conductor factories often feature monorail systems that have been installed in the ceilings to transport components such as silicon wafers between stations for automatic loading and processing. These systems are frequently overlooked, but can cause image interference if they are located too close to microscopy rooms.”
Jong, who has been in the semiconductor industry since 1985, concluded: “I came across Spicer when I was first looking for a solution to magnetic field interference. Spicer is highly reputable and its magnetic field cancelling systems – the SC22, SC24 and SC26 – are very intuitive to use, requiring minimal training which can easily be conducted over email. My relationship with the company has developed ever since, and all of my customers are extremely satisfied with the Spicer products and how well they resolve image distortion issues. The additional features such as the real-time monitoring and auto-reset functions also make these systems excellent.”
For more information on Spicer’s magnetic field cancelling systems, visit https://www.spicerconsulting.com/products.
About Spicer Consulting Limited
Since it was established in 1988, Spicer Consulting has built a world-wide reputation in magnetic field cancelling for Electron Microscopes and similar instruments. Today, working with equipment manufacturers and users alike, the company is recognised as an industry expert in maximising the performance of electron microscopes, electron beam lithography systems, CD metrology and focused ion beam tools.
Spicer Consulting magnetic field cancelling systems protect sensitive equipment in the world's leading laboratories, universities and semiconductor manufacturing plants, as well as in the test facilities of electron and ion beam equipment manufacturers. Its magnetic field, vibration and acoustic analysis systems have been adopted as standard equipment for the conduct of site surveys by leading equipment manufacturers. Spicer Consulting is located in Stewartby, Bedfordshire, within the United Kingdom’s Golden Triangle of elite universities in London, Cambridge and Oxford.